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据《Semiconductor International》83年1月号报道:地处巴黎近郊的Cameca公司已把他们第一台步进重复x射线光刻机交付于委托者——汤姆逊——CSF元件与材料公司使用。该设备采用以激光为基础的连续光刻系统和铜靶x射线源;分辨率达到0.1μm,对准精度为0.2μm。设备的价格约为一百五十万美元。制造商声称,他们提供的分辨率和对准精度是迄今最佳的。Cameca公司还打算向欧洲共同体编制中的其它欧洲半导体制造商提供类似的设备以发展微细光刻技术。
According to Semiconductor International's January 83 report: Cameca, located in the outskirts of Paris, has delivered their first step-and-repeat x-ray lithography machine to consignor Thomson-CSF Components and Materials. The device uses a laser-based continuous lithography system and copper target x-ray source; resolution of 0.1μm, the alignment accuracy of 0.2μm. The price of the equipment is about 1.5 million U.S. dollars. Manufacturers claim that the resolution and alignment accuracy they provide is by far the best. Cameca also plans to provide similar equipment to other European semiconductor manufacturers in the European Community to develop micro-lithography.