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本文提出一种以光电器件中的电流表征管芯在投影仪上的象与接收器重合程度的闭环全自动引线键合机。其特点为:1)以模板后的光电器件的有效灵敏面积组成与管芯版图标志点的象一致的信号接收器;2)用与误差范围相应的工作台机械扫描使象与接收器初步重合;3)用光电信号微分脉冲控制具有停步环节的自寻最优控制系统将象与接收器进一步重合;4)在键合过程中将管芯上的焊点及框架上的焊点逐一与劈刀对准。 这种方法对集成电路和管子的金丝球键合、超声键合都适用。以上述前三占为基礎可以做出光电对准式自动装片机。 分析表明这种自动引线键合机能够达到的指标比工业电视加计算机的自动引线键合机的指标要高。
This paper presents a closed-loop, fully-automated wire bonder that characterizes the image-to-receiver overlap of a die on a projector with current in an optoelectronic device. Its characteristics are: 1) the effective sensitive area of the photoelectronic device after the template is composed of the same signal receiver as that of the die layout mark point; 2) the workbench mechanical scanning corresponding to the error range makes the image initially coincide with the receiver ; 3) using optoelectronic signal differential pulse control self-search with the rest of the optimal control system will be like the receiver and further coincidence; 4) in the bonding process will die on the core and the solder joints on the frame one by one and Rip knife alignment. This method is suitable for gold wire bonding and ultrasonic bonding of integrated circuits and tubes. Based on the above three can be made based on photoelectric alignment automatic loading machine. Analysis shows that this automatic wire bonding machine can achieve the target than the industrial TV plus computer automatic wire bonding machine index higher.