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集成化敏感元件的一个重要功能,是将输入的模拟信号变换为数字或频率—模拟信号。文章就此论述了I~2L(集成注入逻辑电路)环形振荡器在电容和电阻式传感器中的应用。通过对试验敏感元件片的研究,获得了不同的信号变换方法。作为单片集成频率—模拟敏感元件的一个例子,已经研制出了压力敏感元件,并且测得了它的灵敏度,线性及温度系数。
An important function of the integrated sensor is to convert the input analog signal to a digital or frequency-to-analog signal. This article discusses the I ~ 2L (integrated injection logic circuit) ring oscillator capacitance and resistance sensor applications. Through the research on the sensitive element of the test, different signal transformation methods are obtained. As an example of a monolithically integrated frequency-analog sensor, a pressure-sensitive element has been developed and its sensitivity, linearity, and temperature coefficient measured.