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一、引言自1948年第一只 Ge 晶体管问世以来,半导体材料正式登上了电子工业的历史舞台。但是,Si 以它独到的特性,很快在半导体材料领域内占据了统治地位。从个别器件到 LSI 甚至超 LSI,从小功率到大功率,从开关器件到场效应器件,以至光电器件,辐射探测器件……,无不显示出它的优越性。1976年全部半导体器件中有70%是用硅做的。为了适应各种不同器件的要求,硅材料工业也做了相应的努力。目前,LSI 是硅材料用量最多,发展最快,前途
I. INTRODUCTION Since the advent of the first Ge transistor in 1948, semiconductor materials have officially taken the historical stage of the electronics industry. However, Si, with its unique characteristics, soon dominated the field of semiconductor materials. From individual devices to LSI and even ultra-LSI, from small power to high power, from switching devices to field-effect devices, and even optoelectronic devices, radiation detection devices ... all show its superiority. In 1976, 70% of all semiconductor devices were made of silicon. In order to meet the requirements of a variety of different devices, the silicon material industry has also made corresponding efforts. At present, LSI is the largest amount of silicon material, the fastest growing and promising