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为了探索准分子激光脉冲直写加工的参数和工艺 ,建立准分子激光微加工系统和材料加工工艺 ,对二维加工过程中激光刻蚀效果与扫描速度和激光参数之间的关系进行了理论推导 ,分析表明最大扫描速度受激光光斑尺寸和重复频率的约束。以玻璃为实验靶材 ,在 2 .7× 1mm2 范围内进行了二维图形刻蚀实验研究。结果显示 ,刻蚀对材料周围的热影响很小 ,刻蚀图形清洁而且清晰 ,通过控制扫描速度可以获得均匀的二维图形
In order to explore the parameter and process of direct write processing of excimer laser pulse, an excimer laser micro-machining system and material processing technology are established. The relationship between laser etching effect and scan speed and laser parameter in two-dimensional machining process is theoretically deduced , The analysis shows that the maximum scanning speed is limited by the laser spot size and repetition frequency. Taking glass as the experimental target, a 2D graphic etching experiment was carried out in the range of 2.7 × 1mm2. The results show that the etching has little effect on the thermal effects around the material, the etched patterns are clean and clear, and a uniform two-dimensional pattern can be obtained by controlling the scanning speed