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介绍了神光-Ⅲ中阵列光学组件缺陷的长景深检测系统的基本组成。利用在系统光阑处进行的相位调制,可以实现景深的延拓效果,从而可以实现在3~13m物距范围内的大景深成像探测。进一步论述了光学检测系统的设计指标、设计思想、设计结果及其仿真评价。模拟结果显示该系统可以实现3~13m纵向范围内阵列光学组件缺陷的同时检测。
The basic composition of the long depth of field detection system for defects in SG-III array optical components is introduced. Depth of field extension can be achieved by phase modulation at the aperture of the system, enabling the detection of large depth of field imaging in the range of 3 ~ 13m object distance. Further discusses the optical inspection system design specifications, design ideas, design results and simulation evaluation. The simulation results show that the system can detect the defects of the array optical components in the longitudinal range of 3 ~ 13m simultaneously.