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介绍了利用交流电桥和相敏检波（PSD）原理设计的薄膜电容真空计电源的电路实施方案、主机电路结构和实测性能，对其中关键的小电容测量方法进行了深入的研究，在8h内测量，电容差值的漂移可小至10－3pF。主机结构采用微机控制和真空计模块化设计，可构成复合真空计或用于组装其他真空计。初步测试结果表明，这种真空计用单规管可以实现从大气至1Pa，覆盖五个数量级的真空度测量。
The circuit implementation scheme, host circuit structure and measured performance of thin-film capacitor vacuum gauge designed by using AC bridge and phase-sensitive detection (PSD) principle are introduced. The key small capacitance measurement methods are deeply studied and measured within 8h , The difference in capacitance can drift as little as 10-3pF. The mainframe structure of computer control and vacuum gauge modular design, can form a composite vacuum gauge or used to assemble other vacuum gauge. Preliminary test results show that this gauge can be used to achieve a single gauge from the atmosphere to 1Pa, covering five orders of magnitude of vacuum measurements.