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采用原子力显微镜 ( AFM) ,对常见的氧化物单层膜、增透膜和高反膜的表面形貌进行了观测 ,并初步研究了激光预处理对薄膜表面形貌的影响。
The surface morphology of common oxide monolayer, antireflection coating and high antireflective film were observed by atomic force microscope (AFM). The effect of laser pretreatment on the surface morphology of the film was also studied.