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光学元件加工质量的检测和评价是保证整个光学系统安全、正常运行的关键.波前功率谱密度(Power Spectral Density,PSD)能给出光学表面的空间频谱分布,反映高精度光学元件加工质量的特殊要求。在总结现有功率谱密度指标基础上,提出由于圆形口径的旋转对称性,可以采用径向波前功率谱密度来表征圆形口径光学元件波前频谱分布特征的方法,并给出了采用三坐标仪作为测试仪器测量圆形口径光学元件的波前功率谱密度时相应的数值计算方法。
The detection and evaluation of optical components processing quality is the key to ensure the safe and normal operation of the entire optical system.Power Spectral Density (PSD) can give the spatial spectral distribution of the optical surface and reflect the processing quality of high-precision optical components special requirements. Based on the conclusion of the existing power spectral density index, the method of using the radial wavefront power spectral density to characterize the wavefront distribution of a circular aperture optical element is proposed due to the rotational symmetry of the circular aperture. Coordinate instrument as a test instrument for measuring the circular aperture optical element wavefront power spectral density corresponding numerical calculation method.