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通过对故障树分析法的运用,建立了半导体设备系统的故障树。对该故障树进行了定性分析和定量分析,求解出故障树的最小割集。分析了该系统的薄弱环节,并采取补救措施。通过对采取措施前后故障树顶事件发生概率和系统可靠度的计算、分析、比较,证明了故障树分析法是一种有效可行的提高半导体设备可靠性的分析方法,该方法也适用于其他设备仪器。
Through the use of fault tree analysis, the fault tree of semiconductor equipment system is established. The fault tree is qualitatively analyzed and quantitatively analyzed, and the minimum cut set of the fault tree is solved. The weaknesses of the system were analyzed and remedial measures were taken. Through the calculation, analysis and comparison of the occurrence probability and system reliability of the top of the tree before and after the measures are taken, the fault tree analysis method is proved to be an effective and feasible method to improve the reliability of semiconductor devices. The method is also applicable to other devices instrument.