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一、引言近年来,我国磁敏霍尔器件技术发展很快,继硅、锗、砷化铟等霍尔元件研制成功后,我所于1980年又研制成功具有国际先进水平的砷化镓霍尔元件。国外近年来又出现了测温测磁多功能器件,使其在工业控制系统中的用途更加广泛。日本已研制出温度补偿型多功能一体化霍尔元件〔1〕,其霍尔电压温度系数由原来的0.05％/℃改善到0.005％/℃,为设计高精度测磁仪表奠定了基础。我们从1984年9月开展此项工作,经
I. INTRODUCTION In recent years, the technology of magneto-sensitive Hall devices in our country has developed rapidly. Following the successful development of Hall devices such as silicon, germanium and indium arsenide, in 1980, we successfully developed the internationally advanced gallium arsenide Element. In recent years abroad, thermometric multi-functional devices have appeared, making their use in industrial control systems more extensive. Japan has developed a temperature compensated multi-function integrated Hall element [1], the Hall voltage temperature coefficient from the original 0.05% / ℃ to 0.005% / ℃, for the design of high-precision magnetometry laid the foundation. We have carried out this work since September 1984