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一、引言可烘烤金属密封的超高真空阀门在我国还是一个薄弱环节。至今定型的商品化的只有无氧铜阀头的,口径为25毫米和50毫米的两种角阀,尚未形成较完整的系列。近几年来,国内有几个单位正在研制口径150、200和300毫米的超高真空闸阀。作为软密封面材料的有氟橡胶、铟和在钛合金板上镀银等。有的已经研制成功并见之于报道。本文介绍的阀门是托卡马克类型的受控核聚变装置HLQ-1上的部件。开始我们为了提高烘烤时的抗氧化性能,采用黄金电镀层作为软密封面,但结果不理想。我们没有在镀金方面深入下去,而是改用了镶嵌金丝圈的方法,取得了较满意的结果。
First, the introduction can be baked metal seal ultra-high vacuum valve in our country is still a weak link. So far, the only commercially available Oxygen-free copper valve head, two kinds of angle 25 mm and 50 mm angle valve, has not yet formed a more complete series. In recent years, several units in China are developing ultra-high vacuum gate valves with diameters of 150,200 and 300mm. As a soft sealing surface material fluorine rubber, indium and titanium plate in silver and so on. Some have been successfully developed and reported on. The valve described in this article is a part of the tokamak-type controlled fusion unit HLQ-1. In the beginning, we used a gold plating layer as a soft sealing surface to improve the oxidation resistance during baking, but the result was not satisfactory. We did not go further in the gold plating, but instead of using the method of inlaid with gold wire circle, and achieved more satisfactory results.