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主要研究了聚酰胺酸的合成和成膜,聚酰亚胺的热环化,柱腔充气靶的组装和检测,柱腔充气系统的研制,靶场装配和测量,采用准动态充气方式的充气工艺等。研究表明,在二胺和二酐按摩尔比 1.01∶1~1.02∶1,反应温度0~5 ℃,反应时间 2~3 h条件下,可以制备出厚度 0.2~1.0μm的聚酰亚胺薄膜;薄膜表面光洁度达0.3~0.4 nm,厚度起伏小于5%,薄膜厚度均匀性和表面光洁度都能满足充气靶端口膜的需要,可承受0.1 MPa的压力差;利用柱腔充气系统,可以实现打靶现场配气与充气,并准确控制和测量靶内的气压,测量的误差小于0.1%。
In this paper, the synthesis and film formation of polyamic acid, the thermal cyclization of polyimide, the assembly and detection of column cavity inflatable target, the development of column cavity inflatable system, the assembly and measurement of shooting range, the inflatable process using quasi-dynamic inflation Wait. The results show that the polyimide film with the thickness of 0.2 ~ 1.0μm can be prepared under the conditions of molar ratio of diamine and dianhydride of 1.01:1 ~ 1.02:1, reaction temperature of 0 ~ 5 ℃ and reaction time of 2 ~ 3 h ; Film surface finish of 0.3 ~ 0.4 nm, thickness fluctuation of less than 5%, the film thickness uniformity and surface finish can meet the needs of inflatable target port film, can withstand the pressure difference of 0.1 MPa; using column cavity inflation system, you can achieve targeting On-site gas distribution and inflation, and accurate control and measurement of target pressure, the measurement error is less than 0.1%.