论文部分内容阅读
碳纳米管的端头部位 ,具有一定的金刚石结构。用于金刚石薄膜气相化学沉积 ,作为籽晶 ,可使薄膜沉积的速度加快 ,结晶的定向性强 ,生长的温度低等优点。本文探讨了碳纳米管的结构 ,初步研究了其在金刚石薄膜气相化学沉积上的应用 ,得到了较好的 <10 0 >方向结晶的薄膜
The end of the carbon nanotubes, with a certain diamond structure. For the diamond film vapor chemical deposition, as a seed crystal, the film can be deposited faster, the crystal orientation is strong, the growth temperature is low and so on. In this paper, the structure of carbon nanotubes (CNTs) has been investigated. The application of CVD in diamond thin films has been studied preliminarily, and a better <10 0> direction crystallized film has been obtained