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一、引言众所周知,集成电路在制造过程中环境好坏将直接影响产品成品率和产品性能。然而具体地讲究竟应怎样为好尚没有取得一致的意见。况且,所谓环境,包括使用的原材料、化学药品的纯度类别等等,范围既广泛又繁杂,不能简单地一概而论。本文只对与器件制造有直接关系的诸如净化室、净化台等净化设备使用的气体,特别是大量消耗的氧气、氮气等的纯度如何及在很大程度上左右器件性能的高纯水等等有关
I. Introduction As we all know, integrated circuits in the manufacturing process environment will directly affect the product yield and product performance. However, exactly what should be done is not yet reached a consensus. Moreover, the so-called environment, including the use of raw materials, chemical purity category, etc., range is both extensive and complicated, can not simply be generalized. This article is only related to the manufacture of devices such as purification rooms, purification units and other purification equipment used in gas, especially the large consumption of oxygen, nitrogen and other purity and to a large extent about the performance of devices such as high purity water and so on