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用化学气相方法合成的金刚石薄膜也具有天然金刚石的各种优异特性.它作为一种宽带隙半导体材料可制备出高温、高速、大功率和抗辐射的电子器件.最近研究还发现,P型金刚石膜有十分显著的压阻效应.特别是随着温度的升高这种效应会增强.Aslam等人首次研究了P型多晶和同质外延金刚石膜的压阻效应.他们的研究结果表明,P型同质外延金刚石膜室温下500×10~(-6)应变时压阻因子(应变计灵敏度)至少是500,超过了单晶硅(120)和多晶硅
The diamond films synthesized by the chemical vapor method also have various excellent properties of natural diamond.It can be used as a kind of wide bandgap semiconductor material to fabricate high temperature, high speed, high power and radiation resistant electronic devices.Recently, it is also found that P-type diamond The film has a very significant piezoresistive effect.Especially with increasing temperature this effect will be enhanced.Aslam et al for the first time studied the P-type polycrystalline and homoepitaxial diamond film piezoresistive effect.The results of their study, The P-type epitaxial diamond film has a piezoresistance factor (strain gage sensitivity) of at least 500 at 500 × 10 -6 strain at room temperature, which exceeds that of single crystal silicon (120) and polycrystalline silicon