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用小角度掠射 Ｘ 光法对工业纯铝，４５＃ 钢等材料表面经离子注入改性后的表层物质进行了物相分析，这一方法可以准确确定材料表层厚度为几十 ｎｍ 时的物相结构 ，从而为确立材料表层改性的机制提供了较为可靠的依据． 对比实验表明，采用小角度掠射 Ｘ 光衍射法比常规衍射仪法更加突出了表层物质对衍射谱的贡献，这为表面物理的研究提供了一种有效的方法．
By using the method of small-angle grazing X-ray, the phase analysis of surface material of industrial pure aluminum and 45 # steel by ion implantation has been carried out. This method can accurately determine the surface material thickness of tens of nm Phase structure, thus providing a more reliable basis for establishing the mechanism of material surface modification. Comparative experiments show that the use of small angle grazing X-ray diffraction method than the conventional diffraction method to highlight the contribution of surface material to the diffraction spectrum, which provides an effective method for the study of surface physics.