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In this work,the microstructure and optical properties of the Mo/Si multilayers mirror for the space extreme-ultraviolet solar telescope before and after 100 keV proton irradiation have been investigated.EUV/soft X-ray reflectometer(EXRR) results showed that,after proton irradiation,the reflectivity of the Mo/Si multilayer decreased from 12.20% to 8.34% and the center wavelength revealed red shift of 0.38 nm,as compared with those before proton irradiation.High-resolution transmission electron microscopy(HRTEM) observations revealed the presence of MoSi 2,Mo 3 Si and Mo 5 Si 3 in Mo-on-Si interlayers before irradiation.The preferred orientation such as MoSi 2 with(101) texture and Mo 5 Si 3 with(310) texture was formed in Mo-on-Si interlayers after proton irradiation,which led to the increase of thickness in the interlayers.It is suggested that the changes of microstructures in Mo/Si multilayers under proton irradiation could cause optical properties degradation.
In this work, the microstructure and optical properties of the Mo / Si multilayers mirror for the space extreme-ultraviolet solar telescope before and after 100 keV proton irradiation have been investigated. EUV / soft X-ray reflectometer (EXRR) results showed that, after proton irradiation, the reflectivity of the Mo / Si multilayer decreased from 12.20% to 8.34% and the center wavelength revealed red shift of 0.38 nm, as compared with those before proton irradiation. High-resolution transmission electron microscopy (HRTEM) observations revealed the presence of of MoSi 2, Mo 3 Si and Mo 5 Si 3 in Mo-on-Si interlayers before irradiation. The preferred orientation such as MoSi 2 with (101) texture and Mo 5 Si 3 with (310) texture was formed in Mo- on -Si interlayers after proton irradiation, which led to the increase of thickness in the interlayers. It is suggested that the changes of microstructures in Mo / Si multilayers under proton irradiation could cause optical properties degradation.