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超高真空设备中,一般需由多种抽气泵组和测量规来产生所需的真空度和进行测量。不论抽气过程或真空测量过程,都需按严格的程序进行操作,否则会破坏设备的运转和损毁机组或测量仪器。可靠的真空设备自动控制装置可以提高真空设备的运转率,也可以保证设备的安全操作。
In ultra-high vacuum equipment, a variety of suction pump sets and gauges are generally required to produce the required degree of vacuum and make measurements. Regardless of the extraction process or the vacuum measurement process, it is required to operate according to strict procedures, otherwise it will undermine the operation of equipment and damage to the unit or measuring instruments. Reliable vacuum equipment automatic control device can improve the operation rate of vacuum equipment, but also can ensure the safe operation of equipment.