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本文根据表面轮廓调制原理,采用计算机控制的单模光纤探针扫描技术及相应的信号处理电路,提出了智能化光纤探针式轮廓仪。文中对仪器构成原理的有关理论基础及关键技术进行了介绍,最后利用本测量技术进行了实验测量,给出了实验结果及误差分析。
In this paper, based on the principle of surface profile modulation, using computer-controlled single-mode fiber probe scanning technology and the corresponding signal processing circuit, put forward an intelligent optical fiber probe profiler. In this paper, the theoretical basis and key technologies of the principle of instrument construction are introduced. Finally, the experimental measurement is carried out by using this measurement technique, and the experimental results and error analysis are given.