TiO_2 Thin Film UV Detectors Deposited by DC Reactive Magnetron Sputtering

来源 :Semiconductor Photonics and Technology | 被引量 : 0次 | 上传用户:nxf_2004_0
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Crystalline_( )TiO_(2) thin films were prepared by DC reactive magnetron sputtering on indium-tin oxide(ITO) thin film deposited on quartz substrate, the photoconductive UV detector on TiO_(2) thin films was based on a sandwich structure of C/ TiO_(2)/ITO. The measurement of the I-V characteristics for these devices shows good ohmic contact. The photoresponse of TiO_(2) thin films was analyzed at different bias voltage. The detector shows a good photoresponse with a rise time of 2 s and a fall time of 40 s, the photocurrent is linearly increased with the bias voltage. Crystalline TiO 2 thin films were prepared by DC reactive magnetron sputtering on indium-tin oxide (ITO) thin film deposited on quartz substrate, the photoconductive UV detector on TiO 2 thin films was based on a sandwich structure of C / TiO_ (2) / ITO. The measurement of the IV characteristics for these devices shows good ohmic contact. The photoresponse of TiO_ (2) thin films was analyzed at different bias voltage. The detector shows a good photoresponse with a rise time of 2 s and a fall time of 40 s, the photocurrent is linearly increased with the bias voltage.
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