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表面粗糙度测量技术是精密工程学中一个典型的“既老又新”的问题.随着工业的发展,不断开发出各种新的测量设备,测量的精度和功能都有所提高.近几年来,随着光学表面粗糙度测量仪的使用,非接触式测量的优点得到重视.尤其是具有极高分辨力的STM(发送测试信息)技术的出现,使人们能够清晰地观察到原子级的凸凹表面。与此同时,被测对象日趋多样化.测量条件越来越苛刻,新的测量方法有其局限性和缺点,为此提出解决这些问题的方法。
Surface roughness measurement technology is a classic “both old and new” problem in precision engineering.With the development of industry, continue to develop a variety of new measuring equipment, measurement accuracy and functionality have increased.Recently, The benefits of non-contact measurement have come to the fore in recent years with the use of optical surface roughness gauges, and in particular the advent of STM (transmit test information) with very high resolving power enables one to clearly observe atomic- Convex surface. At the same time, the objects under test are becoming more and more diversified, the measurement conditions are more and more harsh, the new measurement methods have their limitations and shortcomings, and the solutions to these problems are put forward.