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随着半导体工艺在真空微电子学中的广泛应用,场致发射平板显示技术得到迅速发展。利用场致发射冷阴极制备的平板显示器件及象素发光管,具有功耗低、体积小和亮度高的特点,在乎板显示和大屏幕显示方面,具有很强的竞争力。金刚石薄膜和类金刚石薄膜具有较低的起始发射电场和较高的电流密度,其作为新型冷阴极在平板显示中的应用引起国内外的极大关注,被认为是较好的场致发射材料。
With the widespread use of semiconductor technology in vacuum microelectronics, field emission flat panel display technology has been rapidly developed. The flat panel display device and the pixel luminescent tube prepared by using the field emission cold cathode have the advantages of low power consumption, small volume and high brightness, and are very competitive in respect of the panel display and the large screen display. Diamond films and diamond-like carbon films have lower initial emission electric field and higher current density. Their applications in flat panel displays as a new type of cold cathode have drawn great attention at home and abroad and are considered as good field emission materials .