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红外光谱是研究非晶硅中杂质含量及其和主晶格原子键合方式的重要方法。以α-Si中的氢为例,通过观测一个、两个或更多个氢原子和一个Si原子键合而引起的键伸缩振动模、摇摆振动模和键弯曲振动模等对应的吸收带,可以研究α-Si∶H中氢的含量,Si和H的结合方式,SiH、SiH_2、SiH_3及(SiH_2)_n的相对含量及存在条件等。本文报道α-Si∶H样品红外反常退火效应的吸收光谱研究。某些原来仅显示880 cm~(-1)
Infrared spectroscopy is an important method to study the impurity content in amorphous silicon and its bonding mode with the host lattice atoms. By taking the hydrogen in α-Si as an example, by observing the absorption bands corresponding to the bond stretching vibration modes, the rocking vibration modes and the key bending vibration modes caused by the bonding of one, two or more hydrogen atoms and one Si atom, The content of hydrogen in α-Si: H, the combination of Si and H, the relative contents and existing conditions of SiH, SiH_2, SiH_3 and (SiH_2) _n can be studied. In this paper, we report the absorption spectra of α-Si: H infrared anomalous annealing. Some of the original only show 880 cm ~ (-1)