Control of growth and structure of Ag films by the driving frequency of magnetron sputtering

• 作 者: 杨培芳 叶超 王响英 郭佳敏 张苏
• 机 构: College of Physics,Optoelectronics and Energy,Soochow University,Key Laboratory of Thin Films of Jia
• 出 处: Plasma Science and Technology
• 发表日期: 2017年08期
• 关键词: sputtering magnetron driving crystalline moderate coarse preferred figure cubic

The growth and structural properties of Ag films prepared by radio-frequency(2, 13.56 and27.12 MHz) and very-high-frequency(40.68 and 60 MHz) magnetron sputtering were investigated. Using 2 MHz sputtering, the Ag film has a high deposition rate, a uniform and smooth surface and a good fcc structure. Using 13.56 and 27.12 MHz sputtering, the Ag films still have a high deposition rate and a good fcc structure, but a non-uniform and coarse surface.Using 40.68 MHz sputtering, the Ag film has a moderate deposition rate and a good fcc structure, but a less smooth surface. Using 60 MHz sputtering, the Ag film has a uniform and smooth surface, but a low deposition rate and a poor fcc structure. The growth and structural properties of Ag films are related to the ions’ energy and flux density. Therefore, changing the driving frequency is a good way to control the growth and structure of the Ag films.

The growth and structural properties of Ag films prepared by radio-frequency (2, 13.56 and 27.12 MHz) and very-high-frequency (40.68 and 60 MHz) magnetron sputtering were investigated. Using 2 MHz sputtering, the Ag film has a high Using 13.56 and 27.12 MHz sputtering, the Ag films still have a high deposition rate and a good fcc structure, but a non-uniform and coarse surfaces. Using 40.68 MHz sputtering, a uniform and smooth surface and a good fcc structure. The Ag film has a moderate deposition rate and a good fcc structure, but a less smooth surface. Using 60 MHz sputtering, the Ag film has a uniform and smooth surface, but a low deposition rate and a poor fcc structure. The growth and structural properties of Ag films are related to the ions’ energy and flux density. Therefore, changing the driving frequency is a good way to control the growth and structure of the Ag films.