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提出了一种新的半导体激光定位技术。它利用多模半导体激光干涉条纹强度分布和双波长细分技术,用两个半导体激光器完成了零点的高精度动态定位。本方法突破了传统白光定位的局限,简化了干涉仪的设计,实现了大范围的零点捕捉。定位精度达到0.01μm。
A new semiconductor laser positioning technology is proposed. It uses the multi-mode semiconductor laser interference fringe intensity distribution and dual-wavelength subdivision technology, using two semiconductor lasers to complete the zero-point high-precision dynamic positioning. The method breaks through the limitations of traditional white light positioning, simplifies the design of the interferometer and realizes a wide range of zero point capture. Positioning accuracy of 0.01μm.