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文中介绍一种新式微机械双杯平面复合差动电容压力传感器的结构设计、工作原理及加工工艺 ,同时 ,对传感器的硬件电路、软件设计也作简要说明 ,并通过实验测试结果反映其结构的新颖性和设计的合理可行性
In this paper, the structure design, working principle and processing technology of a novel micro-mechanical double-cup planar differential capacitive pressure sensor are introduced. At the same time, the hardware circuit and software design of the sensor are also briefly described. The experimental results reflect the structure Novelty and reasonable design feasibility