Photoic crystal nanobeam cavity devices for on-chip integrated silicon photonics

• 作 者: Daquan Yang Xiao Liu Xiaogang
• 机 构: StateKeyLaboratoryofInformationPhotonicsandOpticalCommunications,StateKeyLaboratoryforArtificialMicr
• 出 处: 半导体学报:英文版
• 发表日期: 2021年2期
• 关键词: PCNC integrated silicon photonics More-than-Moore LAB-ON-A-CHIP hybrid devices
• 基金项目: This work was supported by the National Key R&D Program of China(Grant No.2016YFA0301302 and No.2018YFB 2200401),the National Natural Science Foundation of China(Grant Nos.11974058,11825402,116540

Integrated circuit(IC)industry has fully considered the fact that the Moore’s Law is slowing down or ending.Alternative solutions are highly and urgently desired to break the physical size limits in the More-than-Moore era.Integrated silicon photonics tec