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木文介绍用国产JWC-1型无油超高真空机组、SJX-1四极分析器和自制软x射线出现电势能谱仪联合装置研究不锈钢的真空出气特性。获得了山不锈钢制做的无油超高真空系统的残余气体分析谱,主要残余气体是H_2O、CO、CO_2、CH_4和H_2。用电子轰击不锈钢样品主要脱出H_2O、CO、CO_2、CH_4、H_2和O_2记录了未经电子轰击处理和轰击处理1小时后的不锈钢中Cr的软x射线出现电势谱。从谱形看出,未经电子轰击处理不锈钢表面主要有Cr_2O_3层(峰高比L_3/L_2≈1),轰击处理1小时后,Cr_2O_3分解,表面主要出现Cr峰(L_3/L_2>1)。这可能是不锈钢在高温下失去抗腐蚀能力和电子轰击脱氧的原因之一。
Mu Wen introduced the domestic JWC-1-type oil-free ultra-high vacuum unit, SJX-1 quadrupole analyzer and homemade soft x-ray potential energy spectrometer combined device to study the stainless steel vacuum outlet characteristics. Residual gas analysis spectra were obtained from an oil-free ultra-high vacuum system made of stainless steel made from stainless steel. The main residual gases are H 2 O, CO, CO 2, CH 4 and H 2. Electron impact stainless steel samples were mainly released from H_2O, CO, CO_2, CH_4, H_2 and O_2. Soft X - ray appearances of Cr in stainless steel were recorded after 1 h without electron impact treatment and bombardment. It can be seen from the spectrum that Cr 2 O 3 layer (peak height ratio L_3 / L_2≈1) was not formed on the surface of stainless steel without electron impact treatment. Cr_2O_3 was decomposed after 1 h of bombardment treatment, and Cr peak (L_3 / L_2> 1) appeared on the surface. This may be one of the reasons why stainless steel loses corrosion resistance at high temperatures and detonates by electron bombardment.