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研究了沉积温度对热舟蒸发氟化镧薄膜结构和光学性能的影响,沉积温度从200℃上升到350℃,间隔为50℃.采用分光光度计测量了样品的透射率和反射率光谱曲线,并在此基础上进行了光学损耗、光学常数以及带隙和截止波长的计算.采用表面轮廓仪进行了表面形貌和表面粗糙度的标定,采用X射线衍射(XRD)方法测量了不同沉积温度下样品的微结构.发现在短波长波段,随着沉积温度的升高,光学损耗增加,晶粒尺寸增大,表面粗糙度略有增加.不过散射损耗在光学损耗中所占比例均很小,光学损耗的增加主要由吸收损耗引起.随着沉积温度的升高,折射率与消光系数增大,带隙变小,相对应的截止波长向长波方向移动.
The effects of deposition temperature on the structure and optical properties of lanthanum fluoride thin films were studied. The deposition temperature was increased from 200 ℃ to 350 ℃ and the interval was 50 ℃. The transmittance and reflectance spectra were measured by spectrophotometer, The optical loss, optical constants, bandgap and cutoff wavelength were calculated based on this method.The surface topography and surface roughness were calibrated by surface profilometer.The XRD patterns were used to measure the different deposition temperature The results show that the optical loss increases with the increase of the deposition temperature and the grain size increases and the surface roughness increases slightly in the short wavelength band.However, the proportion of the scattering loss in the optical loss is very small , The increase of optical loss is mainly caused by the absorption loss.With the increase of deposition temperature, the refractive index and extinction coefficient increase, the band gap becomes smaller, and the corresponding cut-off wavelength moves toward longwave.