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本文研究粗磨、细磨、机械抛光和离子研磨四种不同的表面处理方法对LiNbO_3和LiTaO_3铁电晶体薄片损耗角正切的影响,对所得到的结果进行了简略的讨论。实验发现,对离子研磨样品进行中温热处理可以有效地降低薄片的损耗角正切。
In this paper, the effects of four different surface treatments of coarse grinding, fine grinding, mechanical polishing and ion milling on the loss tangent of LiNbO_3 and LiTaO_3 ferroelectric thin films were studied. The results obtained were briefly discussed. It was found that the medium temperature heat treatment of the ion-milled samples can effectively reduce the loss tangent of the sheet.