论文部分内容阅读
We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled microoptomechanical infrared imaging device.Each cantilever element has an optimized deformation magnification structure.A 160×160 array with a 120μm×120μm pitch is fabricared and an optical readout is used to collectively measure deflections of all microcantilevers in the array.Tharmal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is giyen statistically and is measured to be about 270mK.