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本文介绍了由微型机控制的线宽标准测量系统。该系统用最大位移量为160μm、直线性小于1.5″的弹性铰链微动工作台作为x方向扫描驱动,压电晶体调焦。可工作在散射光照明或部分相干光照明条件下。测量不确定度小于±0.1μm。同时还研制了一套可供厂家使用的掩膜线宽标准样板。
This article describes the standard line-width measurement system controlled by a microcomputer. The system uses an elastic hinged fretting table with maximum displacement of 160μm and linearity of less than 1.5 "as the x-direction scanning drive and piezoelectric crystal focusing, which can work under the conditions of scattered light illumination or partially coherent illumination. The measurement uncertainty Degree less than ± 0.1μm. Also developed a set of manufacturers for the use of mask line width standard template.