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给出了用于软Ｘ射线投影光刻的激光等离子体源靶材的选择依据。计算了类锂氧离子的辐射跃迁波长和相应的跃迁速率值。并通过与常规金属靶的比较，给出了实验靶的一些特性。
The selection basis of laser plasma source target for soft X-ray projection lithography is given. The radiation transition wavelengths and the corresponding transition rates of lithium-like ions were calculated. And by comparing with the conventional metal target, some characteristics of the experimental target are given.