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超导量子干涉仪(SQUID)放大器具有低输入阻抗、低噪声、低功耗等优点,目前被广泛用于微弱信号的检测领域.与其他工艺相比,Nb/Al-Al Ox/Nb结构的约瑟夫森结具有相对较高的转变温度(Tc)、高的磁通电压调制系数以及良好的热循环能力、较宽的临界电流范围,因此是制备SQUID放大器的很好选择.设计并制作了欠阻尼、过阻尼约瑟夫森结以及具有Washer型输入线圈的单SQUID放大器,通过在He3制冷机3 K温区下对器件电流-电压特性进行测量,得到良好的结I-V特性曲线、SQUID调制特性,初步实现利用SQUID进行放大作用,并计算了SQUID的电流分辨率.此项工作对于超导转变边沿传感器读出电路的实现具有重要的意义.
The SQUID amplifier has the advantages of low input impedance, low noise, low power consumption and is widely used in the field of weak signal detection.Compared with other processes, the SQUID amplifier The Josephson junction has a relatively high transition temperature (Tc), a high modulation coefficient of the flux voltage, good thermal cycling capability, and a wide critical current range, making it a good choice for SQUID amplifiers. Damping, overdamped Josephson junctions, and a single SQUID amplifier with Washer-type input coils, a good junction IV characteristic curve and SQUID modulation characteristics were obtained by measuring the device current-voltage characteristics in a 3 K temperature range of a He3 refrigerator SQUID is used for amplification and the current resolution of SQUID is calculated.This work is of great significance to realize the readout circuit of the superconducting transition edge sensor.