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采用Al和TiC靶通过磁控共溅射方法制备了Ti:C≈1的不同Ti和C含量的铝基复合薄膜,研究了Ti和C含量对薄膜微观结构和力学性能的影响.结果表明:Ti和C的共同加入使复合薄膜形成了同时具有置换固溶和间隙固溶特征的“双超”过饱和固溶体,复合薄膜的晶粒尺寸在较低的溶质含量下就迅速减小到100 nm以下,并随溶质含量的增加继续减小.相应地,薄膜的硬度也从纯Al的1.3 GPa迅速提高,在含0.6%(Ti,C)时可达到2.1 GPa,并在含6.4%(Ti,C)时达到最高值7.0 GPa.随溶质含量的进一步提高,复合薄膜逐渐呈现非晶态,硬度也略有降低.研究结果显示了Ti和C双超过饱和固溶对铝基薄膜具有显著的晶粒细化作用和强化效果.
The effects of Ti and C content on the microstructure and mechanical properties of the films were investigated by magnetron co-sputtering with Al and TiC targets. The results show that the Ti- The co-addition of Ti and C resulted in the formation of a supersaturated supersaturated solid solution with both substitutional solution and interstitial solid solution. The grain size of the composite thin film decreased rapidly with the low solute content 100 nm, and decreased with the increase of solute content.Accordingly, the hardness of the films also increased rapidly from 1.3 GPa of pure Al to 2.1 GPa at 0.6% (Ti, C) (Ti, C) reaches 7.0 GPa. With the further increase of solute content, the composite films gradually appear amorphous, the hardness is also slightly decreased.The results show that the Ti and C over saturated solution on the aluminum-based film has Significant grain refinement and strengthening effect.