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本文提出用准光腔测量薄膜材料复介电系数的新技术．根据双层介质的测量原理，把多层薄膜叠加起来并压上一块介电特性已知的平板样品以消除空气间隙及平整卷曲材料．推导了双层介质的正确理论计算公式，更正了以往文献中的失误之处．采用简易的变腔长法，对几种薄膜材料进行了测量，取得了满意的结果．
In this paper, we propose a new technique to measure the complex dielectric coefficient of thin film materials with a quasi-optical cavity. Based on the principle of two-layer media, multilayer films are stacked and pressed against a plate of dielectric with known properties to eliminate air gaps and flatten the curled material. The correct theoretical formula of double layer medium is deduced and the mistakes in the past literature are corrected. Using a simple variable cavity length method, several thin film materials were measured and satisfactory results were obtained.