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研究了一种新的低温渗氮方法──电子回旋共振（ＥＣＲ）微波等离子体源离子渗氮。对纯铁、４５钢和３５ＣｒＭｏ钢试样在１５０～３５０℃进行渗氮处理，测定了渗氮层的硬度和晶体结构。结果表明，纯铁在低于２００℃的温度下即可获得连续分布的表面氮化物层，３５ＣｒＭｏ钢在低于２５０℃温度处理也可获得良好的渗氮层。
A new method of cryogenic nitriding - electron cyclotron resonance (ECR) microwave plasma source ion nitriding was studied. The pure iron, 45 steel and 35CrMo steel samples were nitrided at 150 ~ 350 ℃. The hardness and crystal structure of the nitrided layer were measured. The results show that the continuous distribution of the surface nitride layer can be obtained when the pure iron is below 200 ℃, and the good nitrided layer can be obtained when 35CrMo steel is treated at temperature less than 250 ℃.