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在电真空器件及半导体器件的生产过程中。需要对真空系统进行真空度的测量。特别是在1×10~(-3)托到1×10~(-8)托这个范围内。普遍使用高真空电离真空计。目前使用的电离真空计都采用图1这样的基本电路,它存在着下列几个问题。一、在仪器的调整和测量过程中。需要交替的扳动各有关开关。在操作上感到不够方便。二、当开关S,使用日久后,簧片的接触
In the vacuum devices and semiconductor devices in the production process. Vacuum measurement of the vacuum system is required. In particular, it is within the range of 1 × 10 -3 Torr to 1 × 10 -8 Torr. Common use of high vacuum ionization vacuum gauge. Ionization vacuum gauges currently used are the basic circuit shown in Figure 1, which has the following problems. First, the instrument adjustment and measurement process. Need to turn the switch alternately. Feel inconvenient in operation. Second, when the switch S, the long-term use, reed contact