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本文应用三维有限元方法，分析计算了沉积超硬涂层的轴承滚动体的内应力及膜厚对内应力分布规律的影响；揭示了在接触区附近，涂层内应力呈局部凹凸面分布，界面附近的底材内应力呈＂礼帽＂型分布；并且当涂层厚度增大时，膜内最大应力减小，底材内最大应力却增大。涂层厚度一般不宜超过８μｍ．计算结果为超硬涂层轴承设计提供了理论参考．
In this paper, the influence of the internal stress and film thickness on the stress distribution of the bearing rolling element of the superhard hardcoated coating was analyzed and calculated by using the three-dimensional finite element method. It was found that the stress distribution in the coating was localized in the vicinity of the contact area, The stress in the substrate near the interface is distributed as a “hat” type. When the coating thickness is increased, the maximum stress in the film decreases and the maximum stress in the substrate increases. Coating thickness generally should not exceed 8μm. The calculation results provide a theoretical reference for the design of superhard coating bearing.