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1引言成功的扫描需要将反射镜、镜座和电机集成于“M立方(MCubed)”系统中。应用于扫描的反射镜必须具备低惯性,同时满足动态平面度和充分散热的要求。快速扫描意味着激光光束要有较宽的带宽,这就
1 Introduction Successful scanning requires the integration of mirrors, mirrors and motors in the “MCubed” system. Mirrors used for scanning must have low inertia while meeting dynamic flatness and adequate heat dissipation requirements. Fast scanning means that the laser beam has a wide bandwidth, which is