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基于MEMS技术的新型微传感器（尺寸从几微米到几毫米的传感器总称）特别是以MEMS（微电子机械系统）技术为基础的传感器已逐步实用化，这是今后发展的重点之一。微机械设想早在１９５９年就被提出，其后逐渐显示出采用MEMS技术制造各种微型新型传感器、执行器和微系统的巨大潜?
The new micro-sensor based on MEMS technology (sensor size from a few microns to several millimeters) Especially the sensor based on MEMS (Micro Electro-Mechanical System) technology has been gradually practical, which is the focus of the future development. The idea of micromechanics was put forward as early as 1959, and then gradually showed the great potential of using MEMS technology to make a variety of new micrometer sensors, actuators and microsystems.