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本文提出了电子探针显微分析中一种新的无标样定量方法—联立方程法,此方法对波谱分析和能谱分析均适用。从元素含量(或氧化物含量)和特征X射线相对强度的各种修正关系式(ZAF修正、α因子修正、δ因子修正等)出发,以标样X射线强度为未知量,并根据试样中所有含量加和为一这一事实,对一组含量各不相同的试样,可得到一组多元线性联立方程。通过求解可计算得到各个标样强度值,并计算各试样的含量。计算通过迭代方法完成,用电子计算机进行计算。当含量不同的试样的数目不足以使用完全无标样联立方程法,或已有标样的数目不足以使用有标样法时,可进行部分标样联立方程法的分析。
In this paper, a new non-standard method for quantitative analysis of electron probe microanalysis, the simultaneous equations method, is proposed, which is suitable for both spectral analysis and energy spectrum analysis. Starting from the various correction formulas (ZAF correction, α-factor correction, δ-factor correction, etc.) of the elemental content (or oxide content) and the relative intensities of the characteristic X-rays and using the X-ray intensity of the standard as an unknown quantity, In the sum of all the contents of this one fact, for a group of different contents of the sample, you can get a set of multiple linear simultaneous equations. Through calculation, each sample intensity value can be calculated, and the content of each sample can be calculated. The calculation is done by means of an iterative method and calculated using a computer. When the number of different content of the sample is not enough to use completely standard sample simultaneous equations method, or the number of existing standard samples is not enough to use the standard sample method, the sample can be part of simultaneous equations method of analysis.