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探讨了曲面激光直写系统中的光焦点定位控制方法。曲面激光直写中光焦点的定位控制要求定位范围毫米级,而定位精度则在亚微米级,因此选用了宏/微双驱动系统。对宏/微双驱动系统进行了动力学建模,并进行了分析。探讨宏/微双驱动系统在直写光刻中的控制方法,对所设计的宏/微双驱动系统进行了实际的测试实验。结果表明:所设计的宏/微双驱动系统在曲面激光直写系统中是可行且有效的。
The method of optical focus control in surface laser direct writing system is discussed. Surface laser write direct focus of the optical positioning control requirements millimeter-level positioning, and positioning accuracy in the sub-micron level, so the choice of a macro / micro dual drive system. The dynamics of macro / micro dual drive system was modeled and analyzed. The control method of macro / micro dual drive system in direct write lithography is discussed. The actual test of macro / micro dual drive system is carried out. The results show that the designed macro / micro dual drive system is feasible and effective in surface laser direct writing system.