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Polyethylene terephthalate (PET) has been modified by Ag, Ti, Cu and Si ion implanta-tion with a dose ranging from 1 × l016 to 2 x 1017 ions/cm2 using a metal vapor vacuum arc (MEVVA)source. The electrical properties of PET have been improved by metal ion implantation. The resistivityof implanted PET decreased obviously with an increase in ion dose. The results show that the conduc-tive behavior of a metal ion implanted sample is different from Si-implantation samples. In order to un-derstant the mechanism of electrical conduction, the structures of implanted layer were observed in de-tail by XRD and TEM. The nano carbon particles were dispersed in implanted PET. The nano metallicparticles were built up in metallic ion implanted layers with dose range from 1 × 1016 to 1 x 1017 ions/cm2. The nanometer metal net structure was formed in implanted layer when a dose of 2 x 1017ions/cm2 is reached. Anomalous fractal growths were observed. These surface structure changes revealedconducting mechanism evolution, lt is believed that the change would result in an improvement of theconductive properties. The conducting mechanism will be changed with increasing metal ion dose.