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基于溶胶-凝胶过程采用2种方法制备具有疏水性能的SiO_2减反射薄膜。在室温下,以六甲基二硅氮烷作为甲基改性剂制备改性SiO_2溶胶,并以此溶胶提拉镀膜。另外,采用对标准TEOS基溶胶-凝胶SiO_2薄膜进行表面气相硅烷化后处理法,获得了疏水性能、激光损伤阈值均高于普通未经后处理薄膜的SiO_2减反射薄膜。比较研究了2种方法获得的减反膜在真空环境下的稳定性,以及抗激光损伤性能。实验发现,表面气相硅烷化后处理更适合制备具有优异光学性能的疏水减反射薄膜。
Two kinds of SiO2 - based antireflection films with hydrophobic properties were prepared by sol - gel process. At room temperature, hexamethyldisilazane as a methyl modifier to prepare a modified SiO 2 sol, and sol sol-traction coating. In addition, the surface of the standard TEOS-based sol-gel SiO_2 film after the gas-phase silylation process to obtain the hydrophobic properties, laser damage threshold are higher than the ordinary non-treated film SiO_2 antireflection film. The stability of the antireflective film obtained by the two methods in vacuum environment and the anti-laser damage property were compared. It was found that the surface gas-phase silylation treatment is more suitable for the preparation of hydrophobic anti-reflection film with excellent optical properties.