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过载能力是加速度传感器的重要参数之一,缺少过载能力是早期硅微机械- 岛结构的加速度传感器未能实用的重要原因.本文采用微机械限位结构解决了梁-岛结构压阻式加速度传感器的抗过载能力,并对设计进行了优化.采用这种方法使量程在50gn以下的器件具备了1000gn以上的过载能力,达到了实用的要求.本文还对测量器件过载能力的落锤法所产生冲击加速度的规律和标定方法进行了研究,并建立了测试系统,对器件进行了冲击过载测试.
Overload capability is one of the important parameters of accelerometer, and the lack of overload capability is an important reason why the accelerometer of island micromechanics-island structure can not be used in practical application.In this paper, the structure of the beam-island piezoresistive accelerometer Of the anti-overload capacity, and the design has been optimized using this method so that the device in the range of 50gn have more than 1000gn overloading capacity, reached a practical requirement.This article also measure the device overload capacity drop hammer method The laws of impact acceleration and calibration methods were studied, and a test system was established to test the device for impact overload.