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提出了一种平面绝对检验的频域面形恢复算法。算法基于两平晶互检方法,对其中一个被测面增加不同旋转角度的测量。通过频域求解算法,可以恢复出被测面的三维绝对面形分布。该数值处理重建算法利用快速傅里叶变换(FFT)和线性滤波处理测量数据。将本文算法结果同传统Zernike多项式拟合算法结果进行了对比,结果吻合较好。3个面的最大PV(peak to valley)值偏差为0.027λ,最大RMS(root mean square)值偏差为0.003λ。实验结果表明,本文算法即使在高空间分辨率的情况下,误差传递也较低,同时计算效率较高。
A planar absolute test algorithm for frequency domain shape restoration is proposed. The algorithm is based on the two crystal mutual detection method, one of the measured surface to increase the measurement of different angles of rotation. Through the frequency domain algorithm, we can recover the three-dimensional absolute surface distribution of the measured surface. The numerical processing reconstruction algorithm utilizes Fast Fourier Transform (FFT) and linear filtering to process the measurement data. The results of the proposed algorithm are compared with those of the traditional Zernike polynomial fitting algorithm. The results agree well with each other. The peak-to-valley (PV) deviation of the three faces is 0.027λ, and the deviation of the root mean square (RMS) is 0.003λ. The experimental results show that the proposed algorithm achieves lower error transfer and higher computational efficiency even at high spatial resolution.