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详细介绍了一种新颖、快速响应的金属-绝缘层-半导体构成的MIS型单晶硅液晶光阀的结构、工作机理、制作工艺和性能参数测试。液晶采用45°扭曲向列型混合场效应工作模式。所得到的光阀的极限分辨率为40lp/mm,口径40mm,最大对比度>100:1,在930nm(△λ=40nm)写入光灵敏度为20μW/cm2,响应时间为15ms。报道了该光阀在大屏幕投影显示中的应用。
The structure, working mechanism, fabrication process and performance parameters of a novel, rapid response, MIS-type monocrystalline liquid crystal light valve made of metal-insulator-semiconductor are introduced in detail. LCD 45 ° twisted nematic hybrid field effect mode of operation. The resulting light valve has a limit resolution of 40 lp / mm, a caliber of 40 mm, a maximum contrast of> 100: 1, a write sensitivity of 20 μW / cm2 at 930 nm (Δλ = 40 nm) and a response time of 15 ms. Reported the light valve in the big screen projection display.