论文部分内容阅读
美国圣巴巴拉研究中心最近研制了一种高质量320×240元的室温红外焦平面列阵,它工作在 8～14μm波段。这种焦平面列阵是根据从美国霍尼威尔公司批准转让的硅微热辐射计制造工艺而制备的。该单块非致冷型焦平面列阵采用了一个新颖的双极CMOS读出电路,使得器件的灵敏度很高,输出信号的均匀性极好。单信号输出时,该320×240元焦平面列阵工作的帧频速率可达60Hz。这种微热辐射计(或称微热探测器-microbolometer)是由圣巴巴拉研究中心采用氧化钒(VO_x)作为热辐射计材料、在硅读出电路基片上单块地制备出来的。设计时器件采用了一种先进的微桥结构,象元尺寸为48μm×48μm,光学占空因子可达65％以上。这种结构也提供了为得到高响应率和高灵敏度所需要的极好的热隔离特性。初步测量表明:孔径为f/1时,该焦平面列阵的噪声等效温差(NETD)灵敏度大约等于100 mK(毫度)。它的灵敏度最终希望小于 20mK。该焦平面列阵也证明了峰-峰输出电压的非均匀性小于100 mV。 这种焦平面列阵安装在永久密封的真空管壳里,管内装有单级热电温度稳定器,构成真空管组件。然后把这些组件装入一个摄象机系统,已经拍摄出高质量的红外图象。
The United States Santa Barbara Research Center recently developed a high quality 320 × 240 yuan room temperature infrared focal plane array, which works in the 8 ~ 14μm band. This focal plane array was prepared according to a silicon microbolometer manufacturing process approved by Honeywell, USA. The monolithic uncooled focal plane array uses a novel bipolar CMOS readout circuit that enables high device sensitivity and excellent output signal uniformity. When the single signal is output, the frame rate of the 320 × 240 element focal plane array can reach 60 Hz. The microbolometer, or microbolometer, was prepared monolithically on a silicon readout circuit substrate by the Santa Barbara Research Center using vanadium oxide (VO_x) as a pyrheliometer material. Design time device uses an advanced micro-bridge structure, the pixel size of 48μm × 48μm, the optical duty factor of up to 65%. This structure also provides the excellent thermal isolation required to achieve high response and high sensitivity. Preliminary measurements show that the NETD sensitivity of this focal plane array is approximately equal to 100 mK (milli-degree) at a f / 1 aperture. Its ultimate hope of less than 20mK sensitivity. This focal plane array also proves that the non-uniformity of the peak-to-peak output voltage is less than 100 mV. This focal plane array is mounted in a permanently sealed vacuum tube housing containing a single stage thermoelectric temperature stabilizer to form a vacuum tube assembly. The components are then loaded into a camera system and high-quality infrared images have been taken.